Growth of highly oriented Pt(100) thin films on a MgO(100) seed layer deposited on Si(100) substrates by rf magnetron sputtering
Growth of highly oriented Pt(100) thin films on a MgO(100) seed layer deposited on Si(100) substrates by rf magnetron sputtering
复制标题
通过射频磁控溅射在 Si(100) 衬底上沉积的 MgO(100) 种子层上生长高度取向的 Pt(100) 薄膜
DOI:
10.1016/s0257-8972(96)03132-5
复制
发表时间:
1997
影响因子:
5.4
通讯作者:
W. Lee
中科院分区:
文献类型:
--
作者:
C. Lee;Sungwoong Chung;Yong Chun Kim;In Seop Chung;D. Wee;W. Lee