NIR spectrometer using a Schottky photodetector enhanced by grating-based SPR
NIR spectrometer using a Schottky photodetector enhanced by grating-based SPR
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DOI：
10.1364/oe.24.025797
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发表时间：
2016-10-31
期刊：
影响因子：
3.8
通讯作者：
Shimoyama, Isao
中科院分区：
文献类型：
--
作者：
Chen, Wenjing;Kan, Tetsuo;Shimoyama, Isao
我们提出了一种使用表面等离子共振 (SPR) 增强的肖特基光电探测器的近红外 (NIR) 光谱测量方法。在 n 型硅片上制作金光栅以形成肖特基势垒并充当 SPR 耦合器。由此产生的光电探测器根据 SPR 耦合角提供波长选择性光电探测。预先计算了一个矩阵来描述这个特性。光谱是从该矩阵和在不同 SPR 耦合角度下测量的光电流获得的。测试了单波长和多波长的光。比较测量表明，我们的方法能够检测波长分辨率与商用光谱仪相当的光谱。 (C) 2016年美国光学学会
We present a near-infrared (NIR) spectrum measurement method using a Schottky photodetector enhanced by surface plasmon resonance (SPR). An Au grating was fabricated on an n-type silicon wafer to form a Schottky barrier and act as an SPR coupler. The resulting photodetector provides wavelength-selective photodetection depending on the SPR coupling angle. A matrix was pre-calculated to describe this characteristic. The spectrum was obtained from this matrix and the measured photocurrents at various SPR coupling angles. Light with single and multiple wavelengths was tested. Comparative measurements showed that our method is able to detect spectra with a wavelength resolution comparable to that of a commercial spectrometer. (C) 2016 Optical Society of America