Characterization of surface micromachined metallic microneedles
Characterization of surface micromachined metallic microneedles
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DOI：
10.1109/jmems.2003.811731
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发表时间：
2003-06-01
影响因子：
2.7
通讯作者：
Frazier, AB
中科院分区：
文献类型：
--
作者：
Chandrasekaran, S;Frazier, AB
本论文的目的是提供金属微针的定量表征。通过力学和流体流动实验，评价了微针的屈曲力、穿透力和压力-流量特性。微针设计的变化特征包括不同的轴长度，不同的尖端锥角/几何形状，以及包含微机械倒钩。发现穿透力的范围从7.8GF(轴长500微米)到9.4GF(轴长1500针)，两者的尖端锥角都是30度。直线型尖端锥角为30度的微针穿透成功率达95%以上。顶端呈15度和20度直线锥度的微针分别有10%和25%的穿透率。对于500微米长的微针轴，屈曲力为98.4GF，对于针(A轴，长度为1000微米)，屈曲力为72.3GF，对于1500微米长的轴，屈曲力为51.6GF。结果表明，500微米长针轴的穿透力为屈曲力的7.9%，1000微针轴为11.6%，1500微针轴为18.2%。对微针流体流动特性进行了研究。以空气为流体介质，当流量为1,000-1/h时，入口压力为49.0pa，当流量为4,000-1/h时，入口压力为243.0 Pa.对于水，1,000-1,000-1,000-1,000-1,000的平均压力需要为30.0千帕，4,000-4,000-1,000的平均压力为106.0.
The purpose of the paper is to provide quantitative characterization of metallic microneedles. Mechanical and fluid flow experiments were performed to evaluate the buckling force, the penetration force, and the pressure versus flow rate characteristics of the microneedles. The microneedle design variations characterized included varying the shaft lengths, varying the tip taper angles/geometries, and the inclusion of micromechanical barbs. The penetration force was found to range from 7.8 gF for a microneedle of shaft length 500 mum, to 9.4 gF for a length of 1500 pin, both with a tip taper angle of 30degrees. Microneedles with a linear tip taper angle of 30degrees penetrated 95 + % of the time without failure. The microneedles with a 15degrees and 20degrees linear tip taper penetrated 10% and 25% of the time, respectively. The buckling force was found to be 98.4 gF for a 500 mum long microneedle shaft, 72.3 gF for a needle (A shaft length 1000 mum, and 51.6 gF for a 1500 mum long shaft. The results demonstrate that the penetration force was 7.9% of the buckling force for 500 mum long shafts, 11.6% for a 1000 mum long shaft, and 18.2% for a 1500 mum long microneedle shafts. The microneedle fluid flow characteristics were studied. An inlet pressure of 49.0 Pa was required for a flow rate of 1000 muL/h and 243.0 Pa for a flow rate of 4000 muL/h using air as the fluid medium. For water, an average pressure of 30.0 KPa was required for a flow rate of 1000 muL/h and 106.0 KPa for a flow rate of 4000 muL/h. [871]