Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology
Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology
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DOI：
10.1016/j.materresbull.2020.110977
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发表时间：
2020-11-01
影响因子：
5.4
通讯作者：
Ono, Takahito
中科院分区：
文献类型：
--
作者：
Nguyen Van Toan;Truong Thi Kim Tuoi;Ono, Takahito
本文报道了以聚苯胺（PANI）为导电层，石墨烯为导电层，硅纳米线为衬底，制备了液态和固态片上微型超级电容器。研究了新型微加工技术以制造三维（3D）分级电极。采用金属辅助化学腐蚀法制备了高长径比硅纳米线。采用微波等离子体增强化学气相沉积（PECVD）法在硅纳米线表面生长了三维分级石墨烯层。石墨烯微球随后被导电PANI涂覆。分别用液体和凝胶电解质分隔对称的高密度纳米线阵列，成功地制备了液体和固体微型超级电容器。液态片上微型超级电容器的面能量和功率密度分别为11.7 μ Wh/cm（2）和0.42 mW/cm（2），而固态片上微型超级电容器的面能量和功率密度分别为10.8 μ Wh/cm（2）和0.78 mW/cm（2）。
Liquid and solid states on-chip micro-supercapacitors based on polyaniline (PANI) coated on graphene nanowalls which grown on silicon nanowires were reported in this work. Novel micro-fabrication technologies were investigated to create three dimension (3D) hierarchical electrodes. High aspect ratio silicon nanowires were produced by metal-assisted chemical etching (MACE). 3D hierarchical graphene nanowalls were grown on silicon nanowire surface by a microwave plasma-enhanced chemical vapor deposition (PECVD). Graphene nanowalls were subsequently coated by conducive PANI. Both of liquid and solid state micro-supercapacitors were successfully fabricated with symmetric face to face high density nanowire arrays separated by liquid and gel electrolytes, respectively. The areal energy and power density of the liquid-state on-chip micro-supercapacitor are 11.7 mu Wh/cm(2) and 0.42 mW/cm(2), respectively, while those of the solid-state on-chip micro-supercapacitor are 10.8 mu Wh/cm(2) and 0.78 mW/cm(2).