Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process
Investigations on the oxide removal mechanism during ultrasonic wedge-wedge bonding process
复制标题
超声波楔-楔键合过程中氧化物去除机理的研究
DOI:
10.1109/eptc.2016.7861512
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发表时间:
2016
期刊:
影响因子:
--
通讯作者:
J. Twiefel
中科院分区:
文献类型:
--
作者:
Y. Long;F. Dencker;F. Schneider;B. Emde;Chun Li;J. Hermsdorf;M. Wurz;J. Twiefel
As an inevitable step during ultrasonic bonding of aluminum or copper materials, the removal of oxides that prevent the bond formation is essential for obtaining high quality. Nevertheless, the oxides removal process is still unclear after tens of years' application of ultrasonic bonding. In this project, the removal mechanism was investigated via the analysis of an artificially coated oxide layer. The oxide removal process was observed in real-time by a high-speed observation system and the oxides distribution after the bonding process was observed under an electron microscope. The results show that during the bonding process, the detached oxides first agglomerate into larger particles and were then pressed outside of the contact area. The areas of the particles were counted and fit to a lognormal distribution.