Electron probe microanalysis: A review of recent developments and applications in materials science and engineering
Electron probe microanalysis: A review of recent developments and applications in materials science and engineering
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DOI：
10.1016/j.pmatsci.2020.100673
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发表时间：
2021-02
影响因子：
37.4
通讯作者：
X. Llovet;A. Moy;P. Pinard;J. Fournelle
中科院分区：
文献类型：
--
作者：
X. Llovet;A. Moy;P. Pinard;J. Fournelle
电子探针微量分析 (EPMA) 是一种广泛用于材料表征的微量分析技术。自 20 世纪 50 年代发展以来，为了提高该技术的能力，已经进行了不同的仪器和分析开发。 EPMA 利用带有气体探测器（波长色散光谱仪，WDS）和/或固态探测器（能量色散光谱仪，EDS）的晶体衍射仪来测量电子束产生的特征 X 射线。在这篇综述中，我们概述了过去三十年来 EPMA 方法最重要的发展，包括大面积衍射仪、场发射枪、高光谱分辨率 X 射线光栅光谱仪、硅漂移探测器以及更强大的蒙特卡罗模拟的结合，这些为使用 EPMA 表征材料开辟了广泛的新可能性。通过选择 EPMA 在材料科学和工程方面的代表性应用来说明该技术的功能，选择这些应用来展示该技术当前的优点和局限性。鉴于之前的评论缺乏对 EPMA 在薄膜和涂层测量方面的卓越功能的报道，因此对该主题进行了详细介绍。我们最终为使用 EPMA 的新研究机会提供了想法。
Electron probe microanalysis (EPMA) is a microanalytical technique widely used for the characterization of materials. Since its development in the 1950s, different instrumental and analytical developments have been made with the aim of improving the capabilities of the technique. EPMA has utilized crystal diffractors with gas detectors (wavelength-dispersive spectrometers, WDS) and/or solid-state detectors (energy-dispersive spectrometers, EDS) to measure characteristic X-rays produced by an electron beam. In this review, we give an overview of the most significant methodological developments of EPMA that have occurred in the last three decades, including the incorporation of large area diffractors, field-emission guns, high-spectral resolution X-ray grating spectrometers, silicon drift detectors, as well as more powerful Monte Carlo simulations, which have opened a wide range of new possibilities for the characterization of materials using EPMA. The capabilities of the technique are illustrated by a selection of representative applications of EPMA to materials science and engineering, chosen to show the current merits and limitations of the technique. Given the lack of coverage in previous reviews of the excellent capabilities of EPMA for measurements of thin films and coatings, that topic is covered in detail. We finally provide ideas for new research opportunities using EPMA.