Balanced electronic detection of displacement in nanoelectromechanical systems
Balanced electronic detection of displacement in nanoelectromechanical systems
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DOI：
10.1063/1.1507833
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发表时间：
2002-09-16
影响因子：
4
通讯作者：
Roukes, ML
中科院分区：
文献类型：
--
作者：
Ekinci, KL;Yang, YT;Roukes, ML
我们描述了一种宽带射频平衡电桥技术，用于电子检测纳米机电系统（NEMS）中的位移。凭借其双端口驱动检测配置，该方法可在直流磁场中生成与 NEMS 谐振器的位移成正比的背景归零电动势。我们通过检测源自 NEMS 机电谐振的小阻抗变化来证明该技术的有效性，这些变化伴随着非常高频率下的大静态背景阻抗。该技术允许研究重要的实验系统，例如掺杂半导体 NEMS，并可能为其他高频位移换能电路带来好处。 (C) 2002 年美国物理研究所。
We describe a broadband radio frequency balanced bridge technique for electronic detection of displacement in nanoelectromechanical systems (NEMS). With its two-port actuation-detection configuration, this approach generates a background-nulled electromotive force in a dc magnetic field that is proportional to the displacement of the NEMS resonator. We demonstrate the effectiveness of the technique by detecting small impedance changes originating from NEMS electromechanical resonances that are accompanied by large static background impedances at very high frequencies. This technique allows the study of important experimental systems such as doped semiconductor NEMS and may provide benefits to other high frequency displacement transduction circuits. (C) 2002 American Institute of Physics.