Two N2+(B2?u+) populations with different Boltzmann distribution of the rotational levels found in different types of N2/Ar discharges?improved estimation of the neutral gas temperature
Two N2+(B2?u+) populations with different Boltzmann distribution of the rotational levels found in different types of N2/Ar discharges?improved estimation of the neutral gas temperature
复制标题
DOI：
10.1088/0022-3727/37/14/008
复制
发表时间：
2004-07
期刊：
影响因子：
--
通讯作者：
V. Linss;H. Kupfer;S. Peter;F. Richter
中科院分区：
文献类型：
--
作者：
V. Linss;H. Kupfer;S. Peter;F. Richter
我们研究了氮分子离子在脉冲磁控溅射放电（镁靶，压力0.1-2.0 Pa）和150 Pa直流辉光放电中的旋转激发依赖于各种工艺参数。为此目的，我们使用了（FNS 0 -0）的第一负系统的0-0带的光学发射光谱，并通过拟合光谱计算了转动温度。通常，假设两个分子群体具有两个不同的旋转温度，可以实现最佳拟合。这些温度及其对FNS 0 -0光谱的贡献显示出对工艺参数的显著依赖性。较低的温度在370-800 K的范围内，并且被认为等于中性气体的平移温度。较高的温度是在1500-3000 K的数量级，其起源是最有可能的重粒子碰撞与旋转激发连接的状态的激发。
We investigated the rotational excitation of the nitrogen molecule ion in a pulsed magnetron sputter discharge (Mg target, pressure 0.1–2.0 Pa) and a 150 Pa dc glow discharge in dependence on various process parameters. For this purpose we used optical emission spectroscopy of the 0–0 band of the first negative system of the (FNS0–0) and calculated the rotational temperature by fitting the spectra. Often, the best fit could be achieved assuming two populations of the molecules having two different rotational temperatures. These temperatures and their contributions to the spectrum of the FNS0–0 show a significant dependence on the process parameters. The lower temperature is in the range of 370–800 K and is believed to be equal to the translational temperature of the neutral gas. The higher temperature is in the order of 1500–3000 K and its origin is most probably the excitation of the state by heavy particle impact connected with rotational excitation.