Non-contact electrostatic micro-bearing using polymer electret
Non-contact electrostatic micro-bearing using polymer electret
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采用聚合物驻极体的非接触式静电微型轴承
DOI：
10.1109/memsys.2008.4443705
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
N. Kasagi
中科院分区：
文献类型：
--
作者：
Y. Tsurumi;Y. Suzuki;N. Kasagi
我们提出了一种被动间隙控制方法，以避免面内传感器/执行器应用中上下结构之间的粘连。使用高性能全氟聚合物材料的图案化驻极体被用来产生排斥静电力。我们的早期原型在空气和液体中都成功地演示了离面排斥力。
We propose a passive gap-spacing control method in order to avoid stiction between top and bottom structures for in-plane sensor/actuator applications. Patterned electret using a high-performance perfluoro polymer material is employed to induce repulsive electrostatic force. Out-of-plane repulsive force is successfully demonstrated with our early prototype both in air and liquid.