Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry.
Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry.
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在相位调制椭圆光度法的一次测量中确定薄膜厚度和折射率。
DOI：
10.1364/josaa.23.002639
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
S. Sukhishvili
中科院分区：
文献类型：
--
作者：
D. Pristinski;V. Kozlovskaya;S. Sukhishvili
椭偏测量法通常用于确定衬底上聚合物层的折射率和/或厚度。然而，通过单波长单角测量同时确定这些参数并不总是可能的。本研究确定了在相位调制椭偏测量的情况下该方法对测量误差的敏感性，并确定了膜厚和折射率解耦的条件。对于特定的薄膜厚度范围，厚度和折射率都可以通过一次高精度的测量来确定。对于有机薄膜，确定了膜厚的最佳范围，并在空气和水中对类水凝胶聚合物膜进行了测试。
Ellipsometry is often used to determine the refractive index and/or the thickness of a polymer layer on a substrate. However, simultaneous determination of these parameters from a single-wavelength single-angle measurement is not always possible. The present study determines the sensitivity of the method to errors of measurement for the case of phase modulated ellipsometry and identifies conditions for decoupling film thickness and refractive index. For a specific range of film thickness, both the thickness and the refractive index can be determined from a single measurement with high precision. This optimal range of the film thickness is determined for organic thin films, and the analysis is tested on hydrogel-like polymer films in air and in water.