Modelling And Analysis Of A MEMS Approach To DC Voltage Step Up Conversion
Modelling And Analysis Of A MEMS Approach To DC Voltage Step Up Conversion
复制标题
直流升压转换 MEMS 方法的建模和分析
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
M. Kraft
中科院分区：
文献类型：
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作者：
C. Haas;M. Kraft
研究了一种基于微机械可变平行板电容和静电驱动器的新型电压升压变换器的工作原理。建立了等效电路模型和系统级SIMULINK模型。基于这些模型，设计参数和预期的器件性能的分析已被执行，作为一个原型实现的起点。可能的应用领域是自供电，独立的传感系统，航空航天应用和任何类型的静电或压电MEMS器件。
This paper studies the principle of a novel voltage step-up converter based on a micromachined variable parallel-plate capacitor in combination with an electrostatic actuator. Electrical equivalent circuit and system-level SIMULINK models have been developed. Based on these models, an analysis of design parameters and expected device performance has been performed to serve as a starting point for a prototype implementation. Possible areas of application are self-powered, stand-alone sensing systems, aerospace applications and any kind of electrostatic or piezoelectric MEMS devices in general.