Generating an M2 × N2 spot array with a dual-period hybrid Dammann grating fabricated using maskless projection lithography
Generating an M2 × N2 spot array with a dual-period hybrid Dammann grating fabricated using maskless projection lithography
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发表时间:
2023
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通讯作者:
Xuan-Ming Duan
中科院分区:
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作者:
Duo Miao;Yuan-Yuan Zhao;Shun-Cheng Cai;Zhi-Xiang Li;Jing-Tao Chen;Jia-Ning An;Xuan-Ming Duan