Temperature Dependence of Trapping and Depth Profiles of 6_keV to 15_keV Deuterium in Carbon
Temperature Dependence of Trapping and Depth Profiles of 6_keV to 15_keV Deuterium in Carbon
复制标题
碳中 6_keV 至 15_keV 氘的捕获和深度剖面的温度依赖性
DOI：
10.1016/0022-3115(76)90309-3
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发表时间：
1976
影响因子：
3.1
通讯作者：
M. Sinha
中科院分区：
文献类型：
--
作者：
B. Scherzer;R. Behrisch;W. Eckstein;U. Littmark;J. Roth;M. Sinha
在300 - 800 K温度范围内，用D（3 He，α）H核反应测量了30 keVD +2和20 keVD +2注入边缘和基底取向热解石墨的深度分布。在室温下，氘浓度高达30 at.%在对应于离子范围的表面层中发现。测得的深度剖面与计算的距离剖面或损伤剖面并不完全一致，而是由两者共同决定的。在较高的温度下，氘浓度降低，分布变宽。在室温下，被捕获的氘的量在低于1018个氘/cm 2的剂量下线性增加。捕集系数约为60%。在5 × 10 ~（18）氘核/cm ~ 2时，探测层（~4000 μ m）中被俘获的氘量达到饱和，俘获系数为零。饱和值随温度的升高而减小，随能量的增加而增大。
Depth profiles of 30 keV D+2and 20 keV D+2implanted into edge and basal-oriented pyrolytic graphite have been measured by means of the D(3He,α)H nuclear reaction in the temperature range of 300 to 800 K. At room temperature deuterium concentrations up to 30 at.% are found in a surface layer corresponding to the range of the ions. The measured depth profiles do not fully agree either with calculated range profiles or with the damage profiles, but are determined by the two together. At higher temperatures the deuterium concentrations decrease and the profiles broaden. At room temperature the amount of trapped deuterium increases linearly with dose below 1018deuterons/cm2. The trapping coefficient is roughly 60%. At 5 × 1018deuterons/cm2the amount of trapped deuterium in the probed layer (~4000 Å) reaches saturation and the trapping coefficient becomes zero. The saturation value decreases with increasing temperature and increases with increasing energy.