Tribological properties of c-BN coatings in vacuum at high temperature
Tribological properties of c-BN coatings in vacuum at high temperature
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DOI：
10.1016/0257-8972(94)90086-8
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发表时间：
1994-11
影响因子：
5.4
通讯作者：
Zhiming Yu;K. Inagawa;Zhuji Jin
中科院分区：
文献类型：
--
作者：
Zhiming Yu;K. Inagawa;Zhuji Jin
采用气体活化喷嘴活化反应蒸发法在硅片上沉积了立方氮化硼（c-BN）薄膜。厚度为0.4 μm的c-BN涂层的显微维氏硬度约为4000 kg mm-2。采用环盘式摩擦磨损试验机研究了c-BN涂层的摩擦学性能。c-BN涂层与不锈钢在空气中滑动接触时的摩擦系数约为0.35。在673 K、1.7 × 10- 3 Pa的真空中，c-BN涂层与不锈钢滑动接触的摩擦系数在初始阶段较高，但在2 min内迅速降低到很小的值（小于0.05），在稳定阶段达到最低值0.009。c-BN涂层的耐磨性也是优异的。分别用粗糙度仪和扫描电镜对c-BN涂层的摩擦表面进行了测量和观察，但没有发现明显的磨损痕迹。
Thin cubic boron nitride(c-BN) coatings were deposited on a silicon wafer by activated reactive evaporation with a gas activation nozzle. The micro Vickers hardness of a c-BN coating with 0.4 μm thickness was about 4000 kg mm-2. The tribological properties of the c-BN coatings were studied by the ring-on-disk type tribotester. The friction coefficient of the c-BN coatings in sliding contact with stainless steel was about 0.35 in air. In a vacuum of pressure 1.7 × 10-3Pa at 673 K, the friction coefficient of the c-BN coatings in sliding contact with stainless steel was high at the initial stage, but then rapidly reduced to a very small value (less than 0.05) within 2 min, and reached the lowest value of 0.009 at the stable stage. The wear resistance of the c-BN coatings was also excellent. The rubbed surface of the c-BN coatings was measured and observed by the roughness tester and the scanning electron microscope respectively, but a clear wear trace was not found.