Buffer-layer enhanced heteroepitaxy of β-Ga2O3:(Sn, Si) thin films by room-temperature excimer laser annealing
Buffer-layer enhanced heteroepitaxy of β-Ga2O3:(Sn, Si) thin films by room-temperature excimer laser annealing
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室温准分子激光退火缓冲层增强 β-Ga2O3:(Sn, Si) 薄膜异质外延
DOI:
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发表时间:
2016
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通讯作者:
and Mamoru Yoshimoto
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作者:
Akifumi Matsuda;Yasuhisa Nozawa;Ryotaro Namba;Satoru Kaneko;and Mamoru Yoshimoto