Buffer-layer enhanced heteroepitaxy of β-Ga2O3:(Sn, Si) thin films by room-temperature excimer laser annealing

Buffer-layer enhanced heteroepitaxy of β-Ga2O3:(Sn, Si) thin films by room-temperature excimer laser annealing
复制标题

室温准分子激光退火缓冲层增强 β-Ga2O3:(Sn, Si) 薄膜异质外延

DOI:
--
复制
发表时间:
2016
期刊:
影响因子:
--
通讯作者:
and Mamoru Yoshimoto
and Mamoru Yoshimoto
中科院分区:
--
文献类型:
--
作者:
Akifumi Matsuda;Yasuhisa Nozawa;Ryotaro Namba;Satoru Kaneko;and Mamoru Yoshimoto

文献摘要

相似文献