Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC)
Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC)
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DOI：
10.1016/j.sna.2005.12.009
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发表时间：
2006-08-14
影响因子：
4.6
通讯作者：
Ryser, Peter
中科院分区：
文献类型：
--
作者：
Birol, Hansu;Maeder, Thomas;Ryser, Peter
介绍了用于低温共烧陶瓷微流控结构制备的石墨粉基牺牲层的工艺和应用。这样的层是以浆料的形式生产的，通过在烧成过程中支撑闭合的三维结构，如通道、膜，在LTCC薄板上丝网印刷以避免下垂。重点介绍了糊料的选择和工艺条件对微流控元件制作的影响。可以看出，石墨粉的完全燃尽是最关键的阶段，因为它与LTCC的开孔消孔过程处于动力学竞争阶段，在我们的系统中，开孔消孔过程发生在785℃。(C)2005 Elsevier B.V.保留所有权利。
The processing and application of graphite powder-based sacrificial layer for fabrication of microfluidic structures in LTCC is described. Such layers are produced as pastes, which are screen-printed in LTCC sheets to avoid sagging, by supporting closed, three-dimensional structures such as channels, membranes during firing. The aim of the paper is to highlight the selection of paste materials and the effects of processing conditions on the fabricated microfluidic components. It is seen that the complete burnout of graphite powder is the most critical stage as it is in kinetic competition with the open pore-elimination process of LTCC, which occurs at 785 degrees C in our system. (c) 2005 Elsevier B.V. All rights reserved.