Fabrication of Wolter‐type x‐ray focusing mirror using epoxy resin
Fabrication of Wolter‐type x‐ray focusing mirror using epoxy resin
复制标题
环氧树脂制备Wolter型X射线聚焦镜
DOI：
10.1063/1.1144652
复制
发表时间：
1994
影响因子：
1.6
通讯作者：
K. Ninomiya
中科院分区：
文献类型：
--
作者：
M. Hasegawa;H. Taira;T. Harada;S. Aoki;K. Ninomiya
我们开发了一种新的Wolter型X射线聚焦镜的制造方法。在该方法中，在真空复制的玻璃复制品和母模芯之间的微小间隙中填充环氧树脂，以减小镜面的粗糙度和图形位移。通过使用Al Kα和C Kα x射线拍摄1000号和2000号铜网的X射线显微照片，以及使用同步辐射聚焦几种波长的X射线，对该反射镜进行了评估。即使将X射线照射从CK α改为Al Kα，在显微照片上也没有发现明显的降解。即使在1.24 nm的波长下，聚焦的光束轮廓也保持不变。的光束尺寸在双正交平面也减少到50%的光束尺寸聚焦的反射镜制造的真空复制。这些结果表明，本方法成功地将表面粗糙度降低到小于6.2 nm（峰谷），并提高了镜面的形状精度。
We have developed a new fabrication method for Wolter‐type x‐ray focusing mirrors. In this method, a slight gap between the master mandrel and the glass replica produced by vacuum replication was filled with epoxy resin to decrease the roughness and the figure displacement of the mirror surface. The mirror was evaluated both by taking x‐ray microphotographs of No. 1000 and No. 2000 copper meshes with Al Kα and C Kα x rays, and by focusing x rays with several wavelengths using synchrotron radiation. No apparent degradation was found in the micrographs even when we changed the irradiating x rays from the C Kα to the Al Kα. The focused beam profile remained unchanged even at the wavelength of 1.24 nm. The beam size in the meridional plane also decreased to 50% of the beam size focused by a mirror fabricated only by vacuum replication. These results indicate that the present method successfully decreases the surface roughness to less than 6.2 nm (peak‐to‐valley) and improves the figure accuracy of the mirror surface.
用于软 X 射线显微镜的 Wolter I 型反射镜的制造和测试
DOI：
--
发表时间：
2004
期刊：
Proceeding of SPIE Volume5533
影响因子：
--
作者：
M.Hoshino;S.Aoki;N.Watanabe;S.Hirai
通讯作者：
S.Hirai