Review of nanomanipulators for nanomanufacturing
Review of nanomanipulators for nanomanufacturing
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用于纳米制造的纳米操纵器综述
DOI：
10.1504/ijnm.2006.011382
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发表时间：
2006
影响因子：
--
通讯作者：
Zhenqi Zhu
中科院分区：
文献类型：
--
作者：
E. Du;H. Cui;Zhenqi Zhu
本文综述了纳米机械臂的概念、设计和在纳米器件的研究、原型和制造方面的实践进展。研究了现有纳米操作系统的局限性，包括在原位应用和纳米制造中的并行应用中，设备尺寸太大的数量级。研究了制造复杂纳米器件和纳米系统所需的多自由度纳米操作的设计策略、机制和实际解决方案。宏观和微观尺度的纳米机械臂的设计和实践进行了审查。
This paper reviews the state-of-the-art of nanomanipulator concepts, designs and practices in research, prototyping and fabrication of nanodevices. Limitations of existing nanomanipulation systems in use have been examined including the device sizes of orders of magnitude too large for in situ applications and parallel applications in nanomanufacturing. Design strategies, mechanisms and practical solutions have been investigated for nanaomanipulation with multiple degrees of freedom, needed for manufacturing complex nanodevices and nanosystems. Both macro- and micro-scale nanomanipulator designs and practices are examined.