Response Characteristics of Silicon Microring Resonator Hydrogen Sensor
Response Characteristics of Silicon Microring Resonator Hydrogen Sensor
复制标题
硅微环谐振式氢气传感器的响应特性
DOI：
10.3390/proceedings2130795
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发表时间：
2018
期刊：
影响因子：
--
通讯作者：
S. Okazaki
中科院分区：
文献类型：
--
作者：
N. Yamasaku;Sosuke Matsuura;Y. Nishijima;T. Arakawa;S. Okazaki
利用载铂氧化钨薄膜制作了硅微环谐振式氢敏传感器，并对其性能进行了评价。采用溶胶凝胶法在磁流变液表面沉积了均匀的薄膜。通过对纯氢气体的暴露，传感器器件在室温下表现出较大的共振波长漂移。结果表明，氢敏层光学性质的变化导致了这一响应。
A silicon microring-resonator (MRR) hydrogen sensor which utilizes platinum-loaded tungsten oxide (Pt/WO3) thin film was fabricated and evaluated. The uniform film was deposited on MRR portion by using sol-gel technique. By the exposure to pure hydrogen gas, the sensor devise showed the large resonant wavelength shift at room temperature. It is suggested that the change in the optical properties of hydrogen sensitive layer results in this response.