A novel monolithically integrated pressure, accelerometer and temperature composite sensor
A novel monolithically integrated pressure, accelerometer and temperature composite sensor
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DOI：
10.1109/sensor.2009.5285926
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发表时间：
2009-06
期刊：
影响因子：
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通讯作者：
Quanxiu Wang;Xinxin Li;Tie Li;M. Bao;Kunmeng Zhang;X. Ge;W. Zhou;Haifei Bao
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文献类型：
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作者：
Quanxiu Wang;Xinxin Li;Tie Li;M. Bao;Kunmeng Zhang;X. Ge;W. Zhou;Haifei Bao
提出了一种新型的单面微机械复合传感器，将压阻式压力传感器、热对流加速度计和温度计集成在一块2.5×2.5mm2的芯片上，用于低成本生产和轮胎压力监测系统（TPMS）等应用。该加速度计是基于热对流，包括一个微加热器和两对微加工热电堆传感器的温差传感。在加热器功率为10.90mW、19.56mW和30.12mW时，对流加速度计的灵敏度分别为37.92μv/g、85.04μv/g和134.08μv/g。该压力传感器的灵敏度范围为450 KPa，非线性度小于± 1.06%FS（满量程），即使在700 KPa的过载情况下，非线性度也小于± 1。62% FS。在这种硼离子注入情况下，多晶硅电阻器的温度系数为−578 ppm/°0。
The paper presents a novel single-side micromachined composite sensor, with a piezoresistive pressure sensor, a thermal-convection accelerometer and a thermometer monolithically integrated in one 2.5×2.5mm2 chip, for low-cost production and applications such as tire-pressure monitoring systems (TPMS). The accelerometer is based on heat convection, including a micro heater and two pairs of micro machined thermopile sensors for temperature difference sensing. The convective accelerometer sensitivities at the heater power of 10.90mW, 19.56mW and 30.12mW are 37.92µv/g, 85.04µv/g and 134.08µv/g, respectively. The pressure sensor sensitivity range 450KPa is about 0.038mV/V/KPa .The Non-linearity is less than ±1.06 % FS (Full Scale) and even in over load case of 700KPa Non-linearity is under ± 1. 62 % FS. In this boron ion implantation case, the temperature coefficient of polysilicon resistor is −578 ppm/°0.