Linear ion source with magnetron hollow cathode discharge
Linear ion source with magnetron hollow cathode discharge
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DOI：
10.1063/1.2130933
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发表时间：
2005-11
影响因子：
1.6
通讯作者：
D. Tang;S. Pu;Linqian Wang;X. Qiu;P. Chu
中科院分区：
文献类型：
--
作者：
D. Tang;S. Pu;Linqian Wang;X. Qiu;P. Chu
本文介绍了一种磁控管空心阴极放电的线性离子源。线性离子源是基于阳极层推力器的封闭漂移电子，在E×B场中以封闭路径移动。在离子源末端设计开缝结构，用于提取磁控管空心阴极放电产生的线性离子束。由于离子源中没有电子源，这种特殊的结构可以在氧气和其他反应气体中不间断地扩展操作。实验评价了离子电流密度和均匀性。利用离子源对聚对苯二甲酸乙二醇酯聚合物薄膜进行表面改性，提高其与ZnS涂层的结合强度。
A linear ion source with magnetron hollow cathode discharge is described in this paper. The linear ion source is based on an anode layer thruster with closed-drift electrons that move in a closed path in the E×B fields. An open slit configuration is designed at the end of the ion source for the extraction of the linear ion beam produced by the magnetron hollow cathode discharge. The special configurations enable uninterrupted and expanded operation with oxygen as well as other reactive gases because of the absence of an electron source in the ion source. The ion current density and uniformity were experimentally evaluated. Using the ion source, surface modification was conducted on polyethylene terephthalate polymer films to improve the adhesion strength with ZnS coatings.