Simple, low degree-of-freedom load-lock and in-vacuum sample transfer
Simple, low degree-of-freedom load-lock and in-vacuum sample transfer
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简单、低自由度的负载锁和真空样品传输
DOI:
10.1116/6.0000495
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发表时间:
2020
影响因子:
1.4
通讯作者:
Kandel, S. Alex
中科院分区:
文献类型:
--
作者:
Schalk, Catlin N.;Turner, David A.;Gans-Forrest, Ashley R.;Jobbins, Matthew M.;Kandel, S. Alex