Numerical simulation for meniscus shape and optical performance of a MEMS-based liquid micro-lens
Numerical simulation for meniscus shape and optical performance of a MEMS-based liquid micro-lens
复制标题
DOI：
10.1364/oe.16.019995
复制
发表时间：
2008-11-24
期刊：
影响因子：
3.8
通讯作者：
Yang, Chao-Fu
中科院分区：
文献类型：
--
作者：
Lee, Shong-Leih;Yang, Chao-Fu
在宏观尺度上用常规方法制作孔径小于1000微米的可调谐光学系统是非常困难的。Krogmann等人（J.Opt.A8，S330-S336，2006）提出了具有300微米孔径的基于MEMS的可调谐液体微透镜系统。在0- 45 V电压范围内，利用电润湿效应改变硅表面弯月面形状的接触角，系统的后焦距可调范围为2.3mm ~无穷远。然而，在他们的透镜系统中发现了球面像差。在本研究中，通过求解透镜液体和周围液体的界面上的Young-Laplace方程，对这种相同的物理配置进行数值模拟。由此产生的弯月面形状产生的后焦距与实验观察非常一致。为了消除球面像差，在透镜上施加电场。电场改变了杨-拉普拉斯方程，从而改变了弯月面形状和透镜质量。数值计算结果表明，在适当的电场作用下，透镜的球差可以基本消除。(C)2008年美国光学学会
It is very difficult to fabricate tunable optical systems having an aperture below 1000 micrometers with the conventional means on macroscopic scale. Krogmann et al. (J. Opt. A 8, S330-S336, 2006) presented a MEMS-based tunable liquid micro-lens system with an aperture of 300 micrometers. The system exhibited a tuning range of back focal length between 2.3mm and infinity by using the electrowetting effect to change the contact angle of the meniscus shape on silicon with a voltage of 0-45V. However, spherical aberration was found in their lens system. In the present study, a numerical simulation is performed for this same physical configuration by solving the Young-Laplace equation on the interface of the lens liquid and the surrounding liquid. The resulting meniscus shape produces a back focal length that agrees with the experimental observation excellently. To eliminate the spherical aberration, an electric field is applied on the lens. The electric field alters the Young-Laplace equation and thus changes the meniscus shape and the lens quality. The numerical result shows that the spherical aberration of the lens can be essentially eliminated when a proper electric field is applied. (C) 2008 Optical Society of America