Dynamic behavior of Resonant Piezoelectric cantilevers partially immersed in liquid

Dynamic behavior of Resonant Piezoelectric cantilevers partially immersed in liquid
复制标题

部分浸入液体中的谐振压电悬臂梁的动态行为

DOI:
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发表时间:
2011
期刊:
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
影响因子:
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通讯作者:
M. Asgari
M. Asgari
中科院分区:
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文献类型:
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作者:
M. Maroufi;Sh. Zihajehzadeh;M. Shamshirsaz;A. Rezaie;M. Asgari

文献摘要

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共振压电激励毫米级悬臂梁(PEMC)在液位、密度传感等方面的应用引起了众多研究者的兴趣。由于在这些应用中,质子交换膜被部分浸入液体中,需要一个合适的分析模型来预测这些设备的动态行为。在这项工作中,一个质子交换膜已被制造的液位传感。基于欧拉-伯努利理论和能量法的分析模型的开发和应用,以评估该设备的性能,相对于不同的尖端浸没深度。为了验证该模型,理论结果与实验结果进行了比较,从0.5毫米到9毫米的尖端浸入水中的深度。模拟结果与实验数据基本吻合。由理论模型得到的不同浸入深度的固有频率的差异保持在8%以内。固有频率偏移与浸没深度的线性区域已被确定为从9至11 mm的深度。
Resonant Piezoelectric-excited Millimeter-sized Cantilevers (PEMC), has attracted many researchers' interest in the applications such as liquid level and density sensing. As in these applications, the PEMC are partially immersed in liquid, an appropriate analytical model is needed to predict the dynamic behavior of these devices. In this work, a PEMC has been fabricated for liquid level sensing. An analytical model based on Euler-Bernoulli theory and energy method is developed and applied to evaluate the performance of this device with respect to different tip immersion depth. To validate this model, the theoretical results are compared with the experimental results for the tip immersion depth from 0.5 mm to 9 mm in water. The simulation results are in almost good agreement with experimental data. The difference in natural frequency obtained by the theoretical model for different immersion depth remains less than 8%. The linear region of the natural frequency shift versus immersion depth has been identified to be from the depth of 9 to 11 mm.