The analytical impact of power control in a radio frequency glow discharge optical emission plasma
The analytical impact of power control in a radio frequency glow discharge optical emission plasma
复制标题
射频辉光放电光发射等离子体中功率控制的分析影响
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
Joel C. Mitchell
中科院分区：
文献类型：
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作者：
K. Marshall;T. Casper;K. Brushwyler;Joel C. Mitchell
直流（dc）和射频（rf）辉光放电功率控制的要求，和限制。直流和射频功率控制之间的差异进行了探讨。列举并解释了射频功率调节所面临的各种困难。鉴于这些挑战，适当的射频辉光放电电源和控制系统的设计目标进行了概述。然后详细介绍了这种新的射频设计的设计和实现。这种新的设计，以处理各种射频困难的能力进行了讨论。这种设计进行评估和实验证据表明，它的功能预期的收集，介绍和讨论。这种新的射频电源设计具有显着的新功能。
Direct current (dc) and radio frequency (rf) glow discharge power control requirements, and limitations are described. The differences between dc and rf power control are explored. The various difficulties faced with rf power regulation are listed and explained. In light of these challenges, the appropriate design goals for an rf glow discharge power supply and control system are outlined. The design and implementation of such a new rf design is then detailed. The ability of this new design to deal with the various rf difficulties is discussed. This design is evaluated and experimental evidence that it functions as anticipated is collected, presented, and discussed. This new rf power supply design is shown to have significant new capabilities.