Measurement of electric-field intensities using scanning near-field microwave microscopy
Measurement of electric-field intensities using scanning near-field microwave microscopy
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使用扫描近场微波显微镜测量电场强度
DOI：
10.1109/tmtt.2003.818938
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发表时间：
2003
影响因子：
4.3
通讯作者：
I. Shvets
中科院分区：
文献类型：
--
作者：
Roman Kantor;I. Shvets
在本文中，我们提出的方法用于测量微波电路表面以上的微波场的电场强度。使用小型化的同轴天线，我们测量所有的空间分量的感应场以上的被测设备。一个特殊的位置/信号差的方法是用来更好地定位测量领域，并增加空间分辨率的字段映射。在扫描过程中，根据先前采集的地形数据，在样品表面上方的规定距离处驱动天线。对于平行于样品表面的切向场分量的测量，天线相对于样品表面倾斜约45/spl deg/。通过绕垂直轴的旋转，可以测量电场的各个分量，并重新计算垂直和水平电场强度。探头在明确定义的现场标准中进行校准，并允许对测量场进行良好的定量表征。
In this paper, we propose methods for the measurement of electric intensities of a microwave field above the surface of microwave circuits. Using miniaturized coaxial antennas, we measure all spatial components of the induced field above device-under-test. A special position/signal difference method is used to better localize the measured field and increase the spatial resolution of the field mapping. During the scanning process, the antenna is driven at the defined distance above the sample surface according to previously acquired topographic data. For measurement of the tangential-field components parallel to the sample surface, the antenna is tilted by approximately 45/spl deg/ relative to the sample surface. By its rotation about the vertical axis, various components of the field are measured, and vertical and horizontal electric-field intensities are recalculated. The probes are calibrated in a well-defined field standard and allow good quantitative characterization of the measured field.
美津浓毫米波扫描近场各向异性显微镜
DOI：
--
发表时间：
2005
期刊：
Review of Scientific Instruments vol.76 no.3
影响因子：
--
作者：
Tatsuo Nozokido;Ryohei Iibuchi;Jongsuck Bae;Koji Mizuno
通讯作者：
Koji Mizuno