Electron optical performance of a scanning tunneling microscope controlled field emission microlens system
Electron optical performance of a scanning tunneling microscope controlled field emission microlens system
复制标题
扫描隧道显微镜控制场发射微透镜系统的电子光学性能
DOI：
10.1116/1.584680
复制
发表时间：
1989
影响因子：
1.4
通讯作者：
M. McCord
中科院分区：
文献类型：
--
作者：
T. Chang;D. Kern;M. McCord
已经探索了使用扫描隧道显微镜（STM）控制的场发射尖端结合微透镜来在低keV能量范围内形成异常高亮度的电子源和低像差的束形成系统。在其基本配置中，STM反馈原理用于尖端与微透镜的精确x，y和z对准，以形成自对准场发射（SAFE）微源。微透镜可以使用微制造技术在硅或其他合适的基板上制成，其尺寸从常规透镜的尺寸减小约三个数量级。由于透镜像差通常与透镜尺寸成比例，因此可以将这种透镜设计成具有可忽略的像差，从而允许实现特别高的亮度和分辨率。本文讨论了这种微源的电子光学性能及其与其他微透镜一起作为束流形成系统的应用。
Use of a scanning tunneling microscope (STM) controlled field emission tip in conjunction with microlenses has been explored to form an exceptionally high brightness electron source and low aberration beam forming system at the low‐keV energy range. In its basic configuration, the STM feedback principle is used for precision x, y, and z alignment of tip to microlens to form a self‐aligned field emission (SAFE) microsource. The microlenses can be made using microfabrication techniques on silicon or other suitable substrates with dimensions reduced by approximately three orders of magnitude from those of conventional lenses. As the lens aberrations generally scale with lens dimensions, such lenses can be designed to have negligible aberrations thus allowing exceptionally high brightness and resolution to be achieved. This paper discusses the electron optical performance of such a microsource and its applications with other microlenses as beam forming systems.