Ultracompact Phase Modulator Based on a Cascade of NEMS-Operated Slot Waveguides Fabricated in Silicon-on-Insulator
Ultracompact Phase Modulator Based on a Cascade of NEMS-Operated Slot Waveguides Fabricated in Silicon-on-Insulator
复制标题
基于绝缘体上硅制造的 NEMS 操作槽波导级联的超紧凑相位调制器
作者：
K. V. Acoleyen;J. Roels;P. Mechet;T. Claes;D. Thourhout;R. Baets
相位调制是集成光电子电路的关键功能之一。在硅光子学平台中，已经采取了几种方法。热光效应速度慢且相对耗电，而基于载波的方法速度快(>；；GB/S)，但有损且微弱。其他(例如，电光)材料的集成通常与限制效果的制造问题作斗争。在这里，我们提出了一种基于纳米机电系统的方法。通过在独立的缝隙波导上施加电压，缝隙宽度将改变，从而导致有效的折射率改变，从而导致相位改变。采用级联结构，可以在不降低速度的情况下放大效果。在一个由三个5.8μm长的独立槽组成的级联上，在13V电压下观察到了40°的相变。预期速度在MHz范围内。
Phase modulation is one of the key functionalities in an integrated photonics circuit. In the silicon photonics platform, several approaches have been undertaken. The thermooptic effect is slow and relatively power hungry, whereas a carrier-based approach is fast ( >; Gb/s) but lossy and weak. Integration of other (e.g., electrooptic) materials typically struggles with fabrication issues that limit the effect. Here, we present a nanoelectromechanical systems-based approach. By applying a voltage over a freestanding slot waveguide, the slot width will change, resulting in an effective index change and thus a phase change. Using a cascaded structure, the effect can be enlarged without reducing the speed. A phase change of 40° was observed for a voltage of 13 V over a cascade of three 5.8-μm-long freestanding slots. The expected speed is in the MHz range.