Microstructuring with femtosecond lasers

Microstructuring with femtosecond lasers
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DOI:
10.1002/(sici)1527-2648(200002)2:1/2
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发表时间:
2000-02-01
影响因子:
3.6
通讯作者:
Welling, H
Welling, H
中科院分区:
材料科学3区
文献类型:
--
作者:
Nolte, S;Kamlage, G;Welling, H

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使用超短激光脉冲可以导致几乎所有类型的材料烧蚀,从而以最小的损害获得非常精确的加工结果。这甚至包括加工具有高导热系数或相对较低熔化温度的精细材料,如金属,以及其光学透明和有机材料。使用持续时间为亚皮秒的脉冲可获得最佳结果。本文综述了超短脉冲激光加工的最新进展。重点介绍了其在微结构、纳米技术和医学等领域的应用前景。
Using ultrashort laser pulses can cause the ablation of nearly all kinds of materials, leading to very precise machining results with minimal damage. This includes even the machining of delicate materials with high heat conductivities or comparatively low melting temperatures, such as metals, as well Its optical transparent and organic materials. The best results are obtained using pulses with sub-picosecond duration. This report summarizes recent progress in ultrashort pulse laser machining. Several promising applications in microstructuring, nanotechnology and medicine are highlighted.