Short-wavelength MEMS-tunable VCSELs
Short-wavelength MEMS-tunable VCSELs
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DOI：
10.1364/oe.16.016093
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发表时间：
2008-09-29
期刊：
影响因子：
3.8
通讯作者：
Goddard, Lynford L.
中科院分区：
文献类型：
--
作者：
Cole, Garrett D.;Behymer, Elaine;Goddard, Lynford L.
我们提出了电注入MEMS可调谐垂直腔面发射激光器的发射波长低于800 nm。在760-780 nm的氧气A波段附近的该波长范围内的操作对于基于吸收的光学气体感测是有吸引力的。这些完全单片器件是基于氧化物孔径AlGaAs外延结构，并纳入了一个悬挂的介质布拉格反射镜的波长调谐。通过实施静电致动，我们展示了调谐速率高达1 MHz的潜力，以及30 nm（767-737 nm）的宽波长调谐范围。(c)2008年美国光学学会
We present electrically-injected MEMS-tunable vertical-cavity surface-emitting lasers with emission wavelengths below 800 nm. Operation in this wavelength range, near the oxygen A-band from 760-780 nm, is attractive for absorption-based optical gas sensing. These fully-monolithic devices are based on an oxide-aperture AlGaAs epitaxial structure and incorporate a suspended dielectric Bragg mirror for wavelength tuning. By implementing electrostatic actuation, we demonstrate the potential for tuning rates up to 1 MHz, as well as a wide wavelength tuning range of 30 nm (767-737 nm). (c) 2008 Optical Society of America