Physical properties of nanostructures grown by oblique angle deposition
Physical properties of nanostructures grown by oblique angle deposition
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DOI：
10.1116/1.2052747
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发表时间：
2005-09
影响因子：
1.4
通讯作者：
J. Singh;T. Karabacak;D. Ye;D. Liu;C. Picu;T. Lu;Gwo-Ching Wang
中科院分区：
文献类型：
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作者：
J. Singh;T. Karabacak;D. Ye;D. Liu;C. Picu;T. Lu;Gwo-Ching Wang
通过斜角沉积在模板或平面基底上生长孤立的三维纳米结构，无论有或没有基底旋转，其中物理阴影效应占主导地位并控制结构。通过原子力显微镜测量硅弹簧和镀钴硅弹簧的机械和机电性能。通过扫描隧道显微镜测量了β相W纳米棒的电性能。给出了弹簧弹性、机电驱动、电子场发射和氩气场电离的测量示例。讨论了均匀纳米结构生长的潜在应用和改进。
Isolated three-dimensional nanostructures were grown on templated or flat substrates by oblique angle deposition with or without substrate rotation where the physical shadowing effect dominates and controls the structures. The mechanical and electromechanical properties of Si springs and Co coated Si springs were measured by atomic force microscopy. The electrical property of β-phase W nanorods were measured by scanning tunneling microscopy. Examples of measurements of the elastic property of springs, electromechanical actuation, field emission of electrons, and field ionization of argon gas are presented. Potential applications and improvements of growth of uniform nanostructures are discussed.