A Fresnel zone plate optics for X-ray microprobe at beamline BL15 in the SAGA Light Source
A Fresnel zone plate optics for X-ray microprobe at beamline BL15 in the SAGA Light Source
复制标题
用于 SAGA 光源中光束线 BL15 处 X 射线微探针的菲涅尔波带板光学器件
DOI：
10.1088/1757-899x/24/1/012018
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
Y. Hirai
中科院分区：
文献类型：
--
作者：
K. Sumitani;E. Magome;Y. Hirai
在SAGA光源的光束线BL15上，研制了一套使用菲涅耳波带片(FZP)的X射线微探头光学系统。一种商用FZP被用作聚焦装置。实验用100μm针孔作为伪点光源。针孔到FZP的距离为1m，FZP到像面的距离调整为0.11m，在8keV的X射线能量下，获得了水平方向6.5μm和垂直方向4.4μm的束流。用测试图示出了扫描显微镜的测量结果。
An optical system for an X-ray microprobe using a Fresnel zone plate (FZP) has been developed at beamline BL15 in the SAGA Light Source. A commercial FZP was used as a focusing device. A 100-μm pinhole was used as a pseudo-point light source in the experimental hutch. The distance between the pinhole and the FZP was 1 m, while the distance between the FZP and the image plane was adjusted to 0.11 m. As a result, the beam sizes of 6.5 μm in the horizontal direction and 4.4 μm in the vertical direction were obtained at an X-ray energy of 8 keV. A scanning microscopic measurement was demonstrated with a test chart.