Development and Application of Porous Vitrified-Bonded Wheel with Ultra-Fine Diamond Abrasives
Development and Application of Porous Vitrified-Bonded Wheel with Ultra-Fine Diamond Abrasives
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DOI：
10.4028/www.scientific.net/kem.257-258.251
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发表时间：
2004-01
期刊：
影响因子：
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通讯作者：
Takeshi Tanaka;S. Esaki;K. Nishida;T. Nakajima;K. Ueno
中科院分区：
文献类型：
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作者：
Takeshi Tanaka;S. Esaki;K. Nishida;T. Nakajima;K. Ueno
为了满足高表面质量、低成本和大尺寸的要求，抛光和研磨工艺已被用于半导体和陶瓷的精加工。然而，由于使用大量的磨料颗粒，加工过程涉及关于工作环境的安全性和磨料颗粒的成本的未解决的问题。为解决这一问题，提出了固定砂轮。我们开发了一种多孔陶瓷结合剂超细金刚石砂轮（0-1/8 m）作为轴承超精加工的第一步。陶瓷结合剂的弹性模量约为树脂结合剂的4倍。虽然金刚石磨料具有超高硬度，在磨削中显示出高效率，但在烧结过程中容易转变为石墨。为此，我们研制了一种低温加热易熔结合剂，以防止金刚石磨料在烧结过程中石墨化。此外，气孔，作为芯片排气，让磨削液容易流动，制造蒸发的成孔介质混合在陶瓷结合剂金刚石砂轮。在超精加工中测试了砂轮的磨削性能。讨论了粘结剂种类、成孔介质和磨粒尺寸对磨削性能的影响。我们成功地在轴承座圈上获得了纳米级Ra的超细精加工表面。
Both polishing and lapping processes have been employed in finishing semiconductors and ceramics in order to meet the demands for high surface quality, low cost, and large size. However, the machining processes involve unresolved problems concerning the safety of work environment and the cost of abrasive grains since a large quantity of abrasive grains is used. As a solution to the problems, the fixed abrasive wheel was proposed. We developed a porous vitrified-bonded wheel of ultra-fine diamond grains (0-1/8 m) as the first step for super-finishing of bearings. The elastic modulus of a vitrified-bond is approximately 4 times that of the resin bond. Although the diamond abrasive has ultra-high hardness and shows high efficiency in grinding, it is easily transformed into graphite during sintering. For this reason, we developed an easily melting bond by low temperature heating in order to prevent graphitization of diamond abrasives during sintering. Additionally, pores, which act as chip exhausts to allow grinding fluid flow easily, were fabricated by evaporating the pore forming mediums mixed in a vitrified-bonded diamond wheel. Grinding performances of the wheels were tested in super-finishing. Influences of different kinds of bonds, pore forming mediums, and sizes of abrasive grains, on grinding performance are discussed. We successfully obtained an ultra-fine finished surface on the bearing race with Ra at the nanometer scale.