Morphological evolution of surfaces irradiated by gas cluster ion beams during thin film deposition
Morphological evolution of surfaces irradiated by gas cluster ion beams during thin film deposition
复制标题
DOI：
10.1016/j.nimb.2005.05.022
复制
发表时间：
2005-08
影响因子：
1.3
通讯作者：
S. Inoue;N. Toyoda;H. Tsubakino;I. Yamada
中科院分区：
文献类型：
--
作者：
S. Inoue;N. Toyoda;H. Tsubakino;I. Yamada
