Comparison of CO-gas sensing characteristics between mono- and multi-layer Pt/SnO2 thin films
Comparison of CO-gas sensing characteristics between mono- and multi-layer Pt/SnO2 thin films
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DOI：
10.1016/s0925-4005(01)00749-3
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发表时间：
2001-06-15
影响因子：
8.4
通讯作者：
Kim, KH
中科院分区：
文献类型：
--
作者：
Kim, DH;Lee, SH;Kim, KH
研究了铂/SnO2复合薄膜对CO气体的传感特性。采用射频磁控溅射技术制备了复合薄膜。对铂/SnO2薄膜的表面形貌进行了修饰，以提高其对CO气体的敏感性。当传感器工作温度为175℃时，沉积铂12次S的SnO_2薄膜对CO气体的灵敏度最高(R-AIR/R-CO=1.23ppm)。为了提高传感器的灵敏度，本工作建议采用多层铂/二氧化锡薄膜。在单层铂(12 S)/SnO2薄膜上再次沉积SnO2和铂团簇，制备了多层铂/SnO2多层膜。与只沉积一层铂的SnO2薄膜相比，多层薄膜对CO气体的敏感性显著提高(R-AIR/R-CO=1.72，对200ppm的CO气体)。由于多层膜具有较高的GO灵敏度，增加了铂与SnO2之间的界面面积。(C)2001 Elsevier Science B.V.保留所有权利。
Sensing characteristics of Pt/SnO2 thin composite films to CO gas were investigated. The composite films were fabricated by rf magnetron sputtering technique. Surface morphology of Pt/SnO2 film was modified to improve its sensitivity to CO gas. The SnO2 films on which Pt was deposited for 12 s showed the maximum sensitivity (R-air/R-CO = 1.23 to CO gas of 200 ppm) at the sensor operation temperature of 175 degreesC. To increase the sensitivity higher, multi-layer Pt/SnO2 films was suggested in this work. The multi-layer Pt/SnO2 film was prepared by depositing SnO2 and Pt cluster layers again on the mono-layer Pt (12 s)/SnO2 film. Compared with SnO2 films on which only one Pt layer deposited, multi-layer films exhibited remarkable improvement of sensitivity to CO gas (R-air/R-CO = 1.72 to CO gas of 200 ppm). The increase of the interface area between Pt and SnO2 was reasoned for the superior GO-sensitivity of the multi-layer film. (C) 2001 Elsevier Science B.V. All rights reserved.