Optimizing surface acoustic wave sensors for trace chemical detection
Optimizing surface acoustic wave sensors for trace chemical detection
复制标题
优化用于痕量化学检测的表面声波传感器
DOI：
10.1109/sensor.1997.635480
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发表时间：
1997
期刊：
影响因子：
--
通讯作者：
Yunfeng Lu
中科院分区：
文献类型：
--
作者：
G. C. Frye;R. Kottenstette;E. Heller;C. Brinker;S. Casalnuovo;A. Sellinger;N. Raman;Yunfeng Lu
本文介绍了用于痕量化学检测的涂层表面声波（SAW）传感器的最新研究进展。具体来说，我们已经证明，与更典型的聚合物涂层相比，高表面积的微孔氧化物可以使SAW传感器响应提高100倍。此外，我们还制造了频率高达500 MHz的GaAs SAW器件，以提供更高的灵敏度和与高频电子器件集成的理想衬底。
This paper describes several recent advances for fabricating coated surface acoustic wave (SAW) sensors for applications requiring trace chemical detection. Specifically, we have demonstrated that high surface area microporous oxides can provide 100-fold improvements in SAW sensor responses compared with more typical polymeric coatings. In addition, we fabricated GaAs SAW devices with frequencies up to 500 MHz to provide greater sensitivity and an ideal substrate for integration with high-frequency electronics.