Suspended microchannel resonators with piezoresistive sensors
Suspended microchannel resonators with piezoresistive sensors
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DOI：
10.1039/c0lc00447b
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发表时间：
2011-01-01
期刊：
影响因子：
6.1
通讯作者：
Manalis, S. R.
中科院分区：
文献类型：
--
作者：
Lee, J.;Chunara, R.;Manalis, S. R.
精确的频率检测使悬浮微通道谐振器（SMR）能够称重单个活细胞、单个纳米颗粒和流体中吸附的蛋白质层。到目前为止，SMR谐振频率已被光学确定，这需要使用外部激光器和光电二极管，并且不容易进行多路测量。在这里，我们展示了第一个SMR谐振频率的电子检测，通过制造压阻传感器，将离子注入单晶硅谐振器。为了验证压阻式SMR，测量了出芽酵母细胞和直径1.6、2.0、2.5和3.0 mm聚苯乙烯珠的混合物的浮力质量直方图。对于设计用于称重微米级颗粒和细胞的smr，采用压阻检测（类似于1 kHz带宽下的3.4 fg）获得的质量分辨率可与传统光杠杆检测器获得的质量分辨率相媲美。消除对昂贵和精密光学元件的需求，将使SMR在多路复用和现场部署应用中具有新的用途。
Precision frequency detection has enabled the suspended microchannel resonator (SMR) to weigh single living cells, single nanoparticles, and adsorbed protein layers in fluid. To date, the SMR resonance frequency has been determined optically, which requires the use of an external laser and photodiode and cannot be easily arrayed for multiplexed measurements. Here we demonstrate the first electronic detection of SMR resonance frequency by fabricating piezoresistive sensors using ion implantation into single crystal silicon resonators. To validate the piezoresistive SMR, buoyant mass histograms of budding yeast cells and a mixture of 1.6, 2.0, 2.5, and 3.0 mm diameter polystyrene beads are measured. For SMRs designed to weigh micron-sized particles and cells, the mass resolution achieved with piezoresistive detection (similar to 3.4 fg in a 1 kHz bandwidth) is comparable to what can be achieved by the conventional optical-lever detector. Eliminating the need for expensive and delicate optical components will enable new uses for the SMR in both multiplexed and field deployable applications.