Indexing electron backscatter diffraction patterns with a refined template matching approach
Indexing electron backscatter diffraction patterns with a refined template matching approach
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DOI：
10.1016/j.ultramic.2019.112845
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发表时间：
2019-12-01
期刊：
影响因子：
2.2
通讯作者：
Britton, T. B.
中科院分区：
文献类型：
--
作者：
Foden, A.;Collins, D. M.;Britton, T. B.
电子背散射衍射（EBSD）是一种成熟的晶体材料表征方法。使用这种技术，我们可以快速获取和索引衍射图案，以提供有关材料表面上晶体的相位和取向信息。传统的分析方法使用基于Hough/Radon变换的信号处理来索引每个衍射图案。这种方法仅限于分析简单的几何特征，而忽略了衍射图案的细微特征，例如相对谱带强度的变化。第二种方法，开发，以解决Hough/Radon变换的缺点，是基于模板匹配的测试实验模式与一个大的潜在的模式库。在目前的工作中，模板匹配的方法已被细化与一个新的互相关函数，允许一个较小的库，并使一个戏剧性的速度在模式索引。通过后续步骤对索引方向进行细化，以允许对来自库搜索的最佳匹配进行小的改变。精制模板匹配的方法被证明是可比的准确性，精度和灵敏度的Hough为基础的方法，甚至超过它在某些情况下，通过使用模拟和实验数据收集的硅单晶和变形的α-铁样品。加速和模式细化方法应该增加模式匹配方法的广泛应用。
Electron backscatter diffraction (EBSD) is a well-established method of characterisation for crystalline materials. Using this technique, we can rapidly acquire and index diffraction patterns to provide phase and orientation information about the crystals on the material surface. The conventional analysis method uses signal processing based on a Hough/Radon transform to index each diffraction pattern. This method is limited to the analysis of simple geometric features and ignores subtle characteristics of diffraction patterns, such as variations in relative band intensities. A second method, developed to address the shortcomings of the Hough/Radon transform, is based on template matching of a test experimental pattern with a large library of potential patterns. In the present work, the template matching approach has been refined with a new cross correlation function that allows for a smaller library and enables a dramatic speed up in pattern indexing. Refinement of the indexed orientation is performed with a follow-up step to allow for small alterations to the best match from the library search. The refined template matching approach is shown to be comparable in accuracy, precision and sensitivity to the Hough based method, even exceeding it in some cases, via the use of simulations and experimental data collected from a silicon single crystal and a deformed alpha-iron sample. The speed up and pattern refinement approaches should increase the widespread utility of pattern matching approaches.