Lateral scanning confocal microscopy for the determination of in-plane displacements of microelectromechanical systems devices
Lateral scanning confocal microscopy for the determination of in-plane displacements of microelectromechanical systems devices
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DOI：
10.1364/ol.32.001743
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发表时间：
2007-06-15
期刊：
影响因子：
3.6
通讯作者：
Pohlenz, Frank
中科院分区：
文献类型：
--
作者：
Li, Zhi;Herrmann, Konrad;Pohlenz, Frank
提出了一种横向扫描共焦显微镜（LtSCM）测量微结构面内位移的方法，特别是微机电系统（MEMS）驱动器和传感器中运动元件的面内位移，这些微结构具有高纵横比和有限的几何尺寸。介绍了LtSCM的工作原理，并对其进行了理论分析，表明LtSCM具有高分辨率地确定物体面内位移、位置甚至几何尺寸的潜力。此外，在面内位移测量的情况下，USCM的测量分辨率应该对可移动微结构的动态性能不敏感，即，从准静态到高速。在原理验证实验中，静电梳状驱动器的电压-位移响应已获得纳米分辨率。(C)2007年美国光学学会
A method named lateral scanning confocal microscopy (LtSCM) is proposed with the aim of determining the in-plane displacement of microstructures, especially of those moving components within microelectromechanical systems (MEMS) actuators and sensors, which feature high aspect ratio and limited geometrical size in one or two dimensions within the surface plane. The principle of the LtSCM is presented and theoretically analyzed, which indicates that the LtSCM has the potential to determine with high resolution the in-plane displacement, position, and even the geometrical size of the object. Furthermore, in the case of inplane displacement measurement, the measurement resolution of the USCM should be insensitive to the dynamic performance of the movable microstructures, i.e., from quasi-static to ultrahigh speed. In a proof-of-principle experiment, the voltage-displacement response of an electrostatic comb-drive actuator has been obtained with nanometric resolution. (C) 2007 Optical Society of America