Compositional design of diamond-like carbon film for tribological performance at elevated temperature: Si and W co-doping
Compositional design of diamond-like carbon film for tribological performance at elevated temperature: Si and W co-doping
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高温摩擦性能类金刚石碳膜的成分设计：Si和W共掺杂
DOI：
10.1016/j.jnoncrysol.2021.121281
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发表时间：
2022
影响因子：
3.5
通讯作者：
Guan Xiaoyan
中科院分区：
文献类型：
--
作者：
Yu Weijie;Huang Weijiu;Wang Junjun;Long Qian;Su Yongyao;Wang Linqing;Guan Xiaoyan
Silicon and tungsten co-doped diamond-like carbon (Si-W-DLC) films with W gradually increased from the top surface to the internal layer were deposited via reactive megnetron sputtering. The mechanical and high-temperature tribological properties of the films were investigated by nanoindentation tester and reciprocating sliding tribometer, respectively. The structures, surface bonding states of the wear tracks were examined by Raman and X-ray photoelectron spectroscopy (XPS), respectively. The results reveal that the gradual W incorporation increases the hardness and elastic modulus from 19.8 ± 0.5 GPa and 183.3 ± 2.8 GPa GPa for the Si-DLC film to 21.6 ± 0.6 GPa and 192.6 ± 3.0 GPa for the Si-W-DLC film, respectively. The Si-W-DLC film maintains a coefficient of friction (COF) below 0.1 and a wear rate of 6.4 × 10−7mm3/N•m at 500 °C, while the Si-DLC film is worn out. The graphitization of the Si-W-DLC film confirmed by the increment of the ID/IGratio from 2.26 at room temperature to 3.44 at 500 °C is beneficial to reduce the coefficient of friction (COF). WO3, WO2, WC and silicon oxides are detected on the wear track tested at 500 °C. It is proposed that the synergistic effect of film graphitization, WO3, WO2, WC and silicon oxides formed on the wear track and the improved mechanical properties attributed to the gradual W distribution are responsible for the well high-temperature tribological properties.
