The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing
The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing
复制标题
DOI：
10.1016/j.sna.2008.06.016
复制
发表时间：
2008-10-03
影响因子：
4.6
通讯作者：
King, W. P.
中科院分区：
文献类型：
--
作者：
Loui, A.;Goericke, F. T.;King, W. P.
我们已经设计，制造，并测试了五个压阻悬臂梁配置，调查的形状和压敏电阻的位置上的灵敏度的microcrystallives下的点加载和表面应力加载的效果。实验研究表明：（1）长大于宽的高纵横比杠杆最适合点加载应用，如显微镜和力测量;（2）短而宽的低纵横比杠杆最适合表面应力加载场景，如生物和化学传感器应用中发生的场景。点载荷和表面应力的敏感性数据与先前开发的有限元模型一致。(C)2008 Elsevier B. V.保留所有权利。
We have designed, fabricated, and tested five piezoresistive cantilever configurations to investigate the effect of shape and piezoresistor placement on the sensitivity of microcantilevers under both point loading and surface stress loading. The experimental study reveals that: (1) high aspect ratio cantilevers that are much longer than they are wide are optimal for point-loading applications such as microscopy and force measurements; (2) low aspect ratio cantilevers that are short and wide are optimal for surface stress-loading scenarios such as those that occur in biological and chemical sensor applications. The sensitivity data for both point loads and surface stress are consistent with previously developed finite-element models. (C) 2008 Elsevier B.V. All rights reserved.