Mid-Infrared Silicon-on-Insulator Fourier-Transform Spectrometer Chip
Mid-Infrared Silicon-on-Insulator Fourier-Transform Spectrometer Chip
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DOI：
10.1109/lpt.2015.2496729
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发表时间：
2016-02-15
影响因子：
2.6
通讯作者：
Mashanovich, Goran Z.
中科院分区：
文献类型：
--
作者：
Nedeljkovic, Milos;Velasco, Aitor V.;Mashanovich, Goran Z.
中红外吸收光谱与广泛的传感应用高度相关。在这封信中，我们展示了一种基于空间外差原理的傅里叶变换光谱仪芯片，该芯片在绝缘体上硅波导平台中实现，并在3.75 μ m波长附近工作。该光谱仪包括波导分裂树，其馈送到具有线性增加的光程长度差的42个马赫-曾德尔干涉仪的阵列。基于校准矩阵的频谱检索算法应用于阵列的固定输出图案，补偿由制造缺陷引起的任何相位和幅度误差。实验证明，低于3 nm的光谱分辨率。
Mid-infrared absorption spectroscopy is highly relevant for a wide range of sensing applications. In this letter, we demonstrate a Fourier-transform spectrometer chip based on the principle of spatial heterodyning implemented in the silicon-on-insulator waveguide platform, and operating near 3.75-mu m wavelength. The spectrometer comprises a waveguide splitting tree feeding to an array of 42 Mach-Zehnder interferometers with linearly increasing optical path length differences. A spectral retrieval algorithm based on calibration matrices is applied to the stationary output pattern of the array, compensating for any phase and amplitude errors arising from fabrication imperfections. A spectral resolution below 3 nm is experimentally demonstrated.