Replication of sub-micron features using amorphous thermoplastics
Replication of sub-micron features using amorphous thermoplastics
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DOI：
10.1002/pen.11055
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发表时间：
2002-07-01
影响因子：
3.2
通讯作者：
Jääskeläinen, T
中科院分区：
文献类型：
--
作者：
Mönkkönen, K;Hietala, J;Jääskeläinen, T
进行了全面的实验研究，以复制亚微米功能，使用注塑成型技术。对于实验，根据它们的流动特性选择了五种不同的塑料材料。材料为聚碳酸酯（PC）、苯乙烯-丁二烯嵌段共聚物（SBS）、抗冲改性聚（甲基丙烯酸甲酯）、甲基丙烯酸甲酯-丙烯腈-丁二烯-苯乙烯聚合物（MABS）和环烯烃共聚物（COC）。可以复制低至200 nm线宽且纵横比（纵横比=深度/宽度）为1：1的纳米特征。在所有选定的材料中，当纵横比增加到2：1时，材料之间的最大差异出现。使用高流动性聚碳酸酯作为模塑材料获得了最有利的结果。当熔体和模具温度高于正常值时，获得了最佳的复制结果。
A comprehensive experimental study was carried out to replicate sub-micron features using the injection molding technique. For the experiments, five different plastic materials were selected according to their flow properties. The materials were polycarbonate (PC), styrene-butadiene block copolymer (SBS), impact modified poly(methyl methacrylate), methyl methacrylate-acrylonitrile-butadiene-styrene polymer (MABS), and cyclic olefin copolymer (COC). Nanofeatures down to 200-nm line width and with aspect ratios (aspect ratio = depth/width) of 1:1 could be replicated. In all selected materials, the greatest differences between the materials emerged when the aspect ratio increased to 2:1. The most favorable results were obtained with the use of high flow polycarbonate as the molding material. The best replication results were achieved when melt and mold temperatures were higher than normal values.