Conventional transmission electron microscopy imaging beyond the diffraction and information limits.

Conventional transmission electron microscopy imaging beyond the diffraction and information limits.
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传统透射电子显微镜成像超出了衍射和信息限制。

DOI:
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发表时间:
2014
影响因子:
8.6
通讯作者:
T. Mehrtens
T. Mehrtens
中科院分区:
物理与天体物理1区
文献类型:
--
作者:
A. Rosenauer;F. Krause;K. Müller;M. Schowalter;T. Mehrtens

文献摘要

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透射电子显微镜(TEM)主要有两种互补的成像模式:常规TEM(CTEM)和扫描TEM(STEM)。在CTEM模式中,用平面电子波照射样品,并且由物镜透镜形成的直接图像被记录在图像平面中。STEM是基于用聚焦电子束扫描样品表面,并用扩展的圆盘或环形探测器收集散射电子。在这里,我们表明,CTEM成像与STEM照明的组合通常允许扩展CTEM成像的点分辨率超过衍射极限。这种新的成像模式改善了成像特性,对色差更鲁棒,具有上级精度的直接结构成像,具有出色的对比度的光元素可视化,甚至允许我们克服传统的显微镜的信息限制。
There are mainly two complementary imaging modes in transmission electron microscopy (TEM): Conventional TEM (CTEM) and scanning TEM (STEM). In the CTEM mode the specimen is illuminated with a plane electron wave, and the direct image formed by the objective lens is recorded in the image plane. STEM is based on scanning the specimen surface with a focused electron beam and collecting scattered electrons with an extended disk or ring-shaped detector. Here we show that combination of CTEM imaging with STEM illumination generally allows extending the point resolution of CTEM imaging beyond the diffraction limit. This new imaging mode improves imaging characteristics, is more robust against chromatic aberration, exhibits direct structural imaging with superior precision, visualizes light elements with excellent contrast, and even allows us to overcome the conventional information limit of a microscope.