Binding Force Measurement between Micro-Scale Flat Surfaces in Aqueous Environment by Force-Sensing Piezoresistive Micro-Cantilevers

Binding Force Measurement between Micro-Scale Flat Surfaces in Aqueous Environment by Force-Sensing Piezoresistive Micro-Cantilevers
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通过力传感压阻微悬臂梁测量水环境中微米级平面之间的结合力

DOI:
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发表时间:
2005
期刊:
18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '05) Proceedings
影响因子:
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通讯作者:
Isao Shimoyama
Isao Shimoyama
中科院分区:
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文献类型:
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作者:
Hiroaki Onoe;Murat Gel;Kazunori Hoshino;Kiyoshi Matsumoto;Isao Shimoyama

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