Direct parameter extraction in feedthrough-embedded capacitive MEMS resonators
Direct parameter extraction in feedthrough-embedded capacitive MEMS resonators
复制标题
DOI：
10.1016/j.sna.2011.02.016
复制
发表时间：
2011-06-01
影响因子：
4.6
通讯作者：
Seshia, Ashwin A.
中科院分区：
文献类型：
--
作者：
Lee, Joshua E. -Y.;Seshia, Ashwin A.
本文提出了一种快速、准确地确定与电容式MEMS谐振器特性相关的参数的方法，这些参数包括品质因数（Q）、谐振频率（f（n））和等效电路参数（如动态电容（C-m））。在输入和输出端口之间存在寄生馈通电容（C-F）的情况下，传输特性由两个谐振标记：串联（S）和并联（P）。通过使用串联和并联谐振，获得这些电路参数的接近近似，而不必首先去嵌入通常埋在馈通中的谐振器动生电流。虽然以前的方法具有相同的目标是众所周知的，我们表明，这些是有限的条件，其中C-F C（m）Q，这是更常见的MEMS谐振器。该方法适用于从制造的SOI MEMS谐振器的测量的电传输获得的数据。然后，将通过直接提取推导出的参数值与通过完全提取过程获得的参数值进行比较，其中首先执行去嵌入，然后基于与通用LRC串联谐振电路相关的经典传递函数对数据进行洛伦兹拟合。(C)2011 Elsevier B. V.保留所有权利。
This paper presents a method for fast and accurate determination of parameters relevant to the characterization of capacitive MEMS resonators like quality factor (Q), resonant frequency (f(n)), and equivalent circuit parameters such as the motional capacitance (C-m). In the presence of a parasitic feedthrough capacitor (C-F) appearing across the input and output ports, the transmission characteristic is marked by two resonances: series (S) and parallel (P). Close approximations of these circuit parameters are obtained without having to first de-embed the resonator motional current typically buried in feedthrough by using the series and parallel resonances. While previous methods with the same objective are well known, we show that these are limited to the condition where C-F C(m)Q, which are more common in MEMS resonators. The method is applied to data obtained from the measured electrical transmission of fabricated SOI MEMS resonators. Parameter values deduced via direct extraction are then compared against those obtained by a full extraction procedure where de-embedding is first performed and followed by a Lorentzian fit to the data based on the classical transfer function associated with a generic LRC series resonant circuit. (C) 2011 Elsevier B.V. All rights reserved.