A friction-coupled measurement model of a 3D scanning probe with unequal stiffness
A friction-coupled measurement model of a 3D scanning probe with unequal stiffness
复制标题
不等刚度3D扫描探头摩擦耦合测量模型
DOI：
10.1088/1361-6501/abb0be
复制
发表时间：
2020-10
影响因子：
2.4
通讯作者：
Junkang Guo
中科院分区：
文献类型：
--
作者：
Weikang Zheng;Zhigang Liu;Junkang Guo
Abstract. The friction force during the scanning of a three-dimensional (3D) probe inevitably leads to undesired tangential displacement, the processing of which is challenging, especially for probes with unequal stiffness. In this paper, a new friction-coupled measurement model of the probe is deduced based on the principle of mechanics so as to realize the positioning and tracking of any friction force between the stylus ball and the sample surface. Considering the two features of the time-varying normal displacement in the scanning and the 3D unequal stiffness of the probe, this paper reveals the nonlinear bidirectional conversion between the 3D resultant force and the resultant displacement at the measuring end. The measurement deviations and the geometric relationship among the frictional force, equivalent force, normal contact force and friction-coupled force are theoretically analyzed. In addition, the finite element analysis (FEA) and calibration experiment analyze the force characteristics and sensitivity of the probe, and obtain the friction-coupled measurement model for actual measurement. The designed measurement experiment on the scanning trajectory compares the calculation difference of the displacement and azimuth angles with and without friction, and obtains a conclusion consistent with the theory and simulation.
登录
查看更多内容
使用 3D 参数模型和定位方法的柔性铰链接触式探头
影响因子：
2.4
作者：
Zheng Weikang;Guo Junkang;Liu Zhigang
通讯作者：
Liu Zhigang
影响因子：
--
作者：
Xuezeng Zhao
通讯作者：
Xuezeng Zhao
DOI：
10.1007/978-3-642-11598-1_15
发表时间：
2010-02
期刊：
--
影响因子：
--
作者：
J. Claverley;A. Georgi;R. Leach
通讯作者：
J. Claverley;A. Georgi;R. Leach
影响因子：
2.4
作者：
S. Ito;I. Kodama;W. Gao
通讯作者：
S. Ito;I. Kodama;W. Gao
影响因子：
5.6
作者：
Li, Yamin;Zeng, Long;Li, Simi
通讯作者：
Li, Simi