Application of a new Cl-plasma-treated Ag/AgCl reference electrode to micromachined glucose sensor
Application of a new Cl-plasma-treated Ag/AgCl reference electrode to micromachined glucose sensor
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DOI：
10.1109/jsen.2003.814649
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发表时间：
2003-06-01
影响因子：
4.3
通讯作者：
Kim, SJ
中科院分区：
文献类型：
--
作者：
Park, SI;Jun, SB;Kim, SJ
首次制作了微机械葡萄糖传感器，并与等离子体处理的Ag/AgCl参比电极进行了集成。在磷酸盐缓冲溶液中，氯离子等离子体暴露的AgCl层表面呈颗粒状，表现出良好的长期稳定性，在商用液结Ag/AgCl参比电极上5h的电位漂移为13 mV。制作的器件表现出典型的安培型葡萄糖传感器的行为，并成功地作为三电极系统运行。由于参比电极的可积性和只使用低温步骤，新的微机械加工工艺可以方便地大规模生产该器件，并在未来实现信号处理电路的单片集成。
Micromachined glucose sensors were fabricated and integrated with the plasma-treated Ag/AgCl reference electrodes for the first time. The surface of the Cl-plasma exposed AgCl layers was of granule-shaped morphology and showed the favorable long-term stability with a 13-mV potential drift after 5 h over a commercial liquid-junction Ag/AgCl reference electrode in phosphate buffered saline. The fabricated devices showed a typical behavior of an amperometric glucose sensor and a successful operation as a three-electrode system. Due to the integrability of the reference electrode and the use of low-temperature steps only, the new micromachined process can allow easy mass production of the device and the monolithic integration of signal processing circuitry in the future.