The Responsivity of a Miniaturized Passive Implantable Wireless Pressure Sensor.
The Responsivity of a Miniaturized Passive Implantable Wireless Pressure Sensor.
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小型无源植入式无线压力传感器的响应度。
DOI：
10.1109/biowireless.2011.5724342
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
Roy,Shuvo
中科院分区：
文献类型：
--
作者：
Jiang,Hao;Lan,Di;Goldman,Ken;Etemadi,Mozziyar;Shahnasser,Hamid;Roy,Shuvo
医学界期望一种可以在身体深处使用的微型无电池植入式无线压力传感器。MEMS技术可以实现高响应度，直接确定微型植入式传感器和外部RF探头之间的操作距离，同时提供读出。在本文中，第一次，系统响应度与传感器设计的解析表达式推导出使用等效电路模型。此外，集成的微线圈电感器和压敏电容器在一个单一的硅芯片上使用MEMS制造技术进行了演示。此外，推导出的分析设计理论验证了这些传感器的测量响应。
A miniature batteryless implantable wireless pressure sensor that can be used deep inside the body is desired by the medical community. MEMS technology makes it possible to achieve high responsivity that directly determines the operating distance between a miniature implanted sensor and the external RF probe, while providing the read-out. In this paper, for the first time, an analytical expression of the system responsivity versus the sensor design is derived using an equivalent circuit model. Also, the integration of micro-coil inductors and pressure sensitive capacitors on a single silicon chip using MEMS fabrication techniques is demonstrated. Further, the derived analytical design theory is validated by the measured responsivity of these sensors.