Design and testing of a novel piezoelectric micro-motor actuated by asymmetrical inertial impact driving principle
Design and testing of a novel piezoelectric micro-motor actuated by asymmetrical inertial impact driving principle
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非对称惯性冲击驱动新型压电微电机的设计与测试
DOI：
10.1063/1.4867455
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发表时间：
2014-03-01
影响因子：
1.6
通讯作者：
Cheng, Guangming
中科院分区：
文献类型：
--
作者：
Zeng, Ping;Sun, Shujie;Cheng, Guangming
本文首次提出了非对称惯性冲击驱动原理，并在此基础上研制了一种新型的压电式直线微电机。它是由具有不对称夹持位置的压电智能悬臂(PSC)在一个驱动周期内产生的惯性冲击力驱动的。当PSC受到典型的简谐电压信号激励时，由于其来回振动时夹持位置的不对称，会产生不同的等效刚度，导致一个周期内两个相反方向上的微小位移差，从而积累微小的位移差，从而实现定向运动。开发了该电机的样机，并对其进行了实验研究。对样机的运动和动力学特性进行了深入的研究。实验结果表明，该微电机的分辨率为0.02µm，最大转速为16.87 mm/S，在电压为100V、频率为35 Hz时，最大负载能力可达1 kg。(C)2014 AIP出版有限责任公司。
In this paper, an asymmetrical inertial impact driving principle is first proposed, and accordingly a novel piezoelectrically actuated linear micro-motor is developed. It is driven by the inertial impact force generated by piezoelectric smart cantilever (PSC) with asymmetrical clamping locations during a driving cycle. When the PSC is excited by typical harmonic voltage signals, different equivalent stiffness will be induced due to its asymmetrical clamping locations when it is vibrating back and forth, leading to a tiny displacement difference on the two opposite directions in a cycle, and then the accumulation of tiny displacement difference will allow directional movements. A prototype of the proposed motor has been developed and investigated by means of experimental tests. The motion and dynamics characteristics of the prototype are well studied. The experimental results demonstrate that the resolution of the micro-motor is 0.02 mu m,the maximum velocity is 16.87 mm/s, and the maximum loading capacity can reach up to 1 kg with a voltage of 100 V and 35 Hz. (C) 2014 AIP Publishing LLC.